Real-Time Speciated VOC Water Analyzer
Entanglement Technologies’ AROMA-UPW analyzer provides real-time, online speciated VOC monitoring of ultrapure water (UPW), reclaim, and wastewater streams in advanced semiconductor manufacturing.
A direct sparge (continuous, dynamic headspace) provides a minimum intervention and sample prep interface to multiple process streams, allowing the analyzer to provide speciated, ng/L analysis online—filling critical gaps in the analytical capabilities provided by TOC analyzers and periodic laboratory GC analysis.
AROMA-UPW integrates automated thermal desorption with broadband cavity ring-down spectroscopy (CRDS) to identify dozens of VOCs (solvents, oxygenated species, chlorinated compounds, and disinfection byproducts) as they evolve across treatment trains.
The intrinsic stability of the CRDS core minimizes maintenance and calibration overhead, enabling long-term unattended operation across semiconductor UPW, reclaim, and water treatment infrastructure. in fab utility environments. AROMA-UPW provides laboratory-grade performance, online.
|
Compound |
CAS Number |
Formula |
BP (°C) |
Water MDL (µg/L)* |
Category |
|---|---|---|---|---|---|
|
Acetone |
67-64-1 |
C3H6O |
56.1 |
0.106 |
Ketone |
|
Isopropanol |
67-63-0 |
C3H8O |
82.6 |
— |
Alcohol |
|
tert-Butanol |
75-65-0 |
C4H10O |
82.4 |
0.349 |
Alcohol |
|
Isoprene |
78-79-5 |
C5H8 |
34.1 |
0.025 |
Diene |
|
1,1-Dichloroethylene |
75-35-4 |
C2H2Cl2 |
31.7 |
0.025 |
Chlorinated alkene |
|
Dichloromethane |
75-09-2 |
CH2Cl2 |
39.6 |
0.020 |
Halomethane |
|
1,1-Dichloroethane |
75-34-3 |
C2H4Cl2 |
57.3 |
0.020 |
Chlorinated alkane |
|
MTBE |
1634-04-4 |
C5H12O |
55.2 |
0.009 |
Ether |
|
Bromochloromethane |
74-97-5 |
CH2BrCl |
68 |
0.019 |
Halomethane |
|
Chloroform |
67-66-3 |
CHCl3 |
61.2 |
0.018 |
Trihalomethane |
|
1,2-Dichloroethane |
107-06-2 |
C2H4Cl2 |
83.5 |
0.011 |
Chlorinated alkane |
|
Benzene |
71-43-2 |
C6H6 |
80.1 |
0.020 |
Aromatic |
|
Trichloroethylene |
79-01-6 |
C2HCl3 |
87.2 |
0.023 |
Chlorinated alkene |
|
1,2-Dichloropropane |
78-87-5 |
C3H6Cl2 |
96.4 |
0.016 |
Chlorinated alkane |
|
Bromodichloromethane |
75-27-4 |
CHBrCl2 |
90 |
0.031 |
Trihalomethane |
|
Bromoform |
75-25-2 |
CHBr3 |
149.1 |
— |
Trihalomethane |
|
Toluene |
108-88-3 |
C7H8 |
110.6 |
0.021 |
Aromatic |
|
1,1,2-Trichloroethane |
79-00-5 |
C2H3Cl3 |
113.7 |
0.016 |
Chlorinated alkane |
|
Dibromochloromethane |
124-48-1 |
CHBr2Cl |
120 |
0.023 |
Trihalomethane |
|
Ethylbenzene |
100-41-4 |
C8H10 |
136.2 |
0.023 |
Aromatic |
|
1,2,3-Trichloropropane |
96-18-4 |
C3H5Cl3 |
157 |
0.037 |
Chlorinated alkane |
|
Dimethyl Sulfide |
75-18-3 |
C2H6S |
37.3 |
— |
Sulfur compound |
|
m+p-Xylene |
108-38-3 / 106-42-3 |
C8H10 |
139 / 138 |
— |
Aromatic |
|
o-Xylene |
95-47-6 |
C8H10 |
144.5 |
— |
Aromatic |
|
Styrene |
100-42-5 |
C8H8 |
145 |
— |
Aromatic |
|
Isopropylbenzene (Cumene) |
98-82-8 |
C9H12 |
152.4 |
— |
Aromatic |
|
alpha-Pinene |
80-56-8 |
C10H16 |
156 |
— |
Terpene |
|
beta-Pinene |
127-91-3 |
C10H16 |
166 |
— |
Terpene |
|
R-Limonene |
5989-27-5 |
C10H16 |
176 |
— |
Terpene |
|
6-Methyl-5-hepten-2-one |
110-93-0 |
C8H14O |
173 |
— |
Ketone |
|
Hydroxyacetone |
116-09-6 |
C3H6O2 |
145 |
— |
Ketone |
|
Hexamethylcyclotrisiloxane (D3) |
541-05-9 |
C6H18O3Si3 |
134 |
— |
Siloxane |
|
Decamethylcyclopentasiloxane (D5) |
541-02-6 |
C10H30O5Si5 |
211 |
— |
Siloxane |
|
Hexanal |
66-25-1 |
C6H12O |
131 |
— |
Aldehyde |
|
Nonanal |
124-19-6 |
C9H18O |
191 |
— |
Aldehyde |
|
Phenol† |
108-95-2 |
C6H6O |
181.7 |
— |
Aromatic |
|
1,3,5-Trimethylbenzene |
108-67-8 |
C9H12 |
164.7 |
— |
Aromatic |
|
1,2,3,5-Tetramethylbenzene |
527-53-7 |
C10H14 |
198 |
— |
Aromatic |
|
2-Hexanone |
591-78-6 |
C6H12O |
127.6 |
— |
Ketone |
|
2-Pentanone |
107-87-9 |
C5H10O |
102 |
— |
Ketone |
|
2-Heptanone |
110-43-0 |
C7H14O |
151 |
— |
Ketone |
|
3-Octanone |
106-68-3 |
C8H16O |
167 |
— |
Ketone |
|
Octamethyltrisiloxane (L3) |
107-51-7 |
C8H24O2Si3 |
153 |
— |
Siloxane |
|
Decamethyltetrasiloxane (L4) |
141-62-8 |
C10H30O3Si4 |
194 |
— |
Siloxane |
|
Hexamethyldisiloxane (L2) |
107-46-0 |
C6H18OSi2 |
100.5 |
— |
Siloxane |
|
Hexanoic acid† |
142-62-1 |
C6H12O2 |
205 |
— |
Carboxylic acid |
|
gamma-Terpinene |
99-85-4 |
C10H16 |
183 |
— |
Terpene |
|
Analysis Time (water) |
30-75 Minutes |
|
Sampling Duration |
1-45 Minutes |
|
Calibration |
As required by testing protocol |
|
Data Reporting |
Attached PC, WAN gateway compatible |
|
Data Format options |
json, csv, kml |
|
Global Positioning System |
Built-In |
|
Sample Volume Range |
5-5000 scc |
|
Sampling Flow Range |
2-500 sccm |
|
Performance Parameter |
Specification |
|
Speciated VOCs (water) |
Up to 27 compounds per cycle (expanding) |
|
Water Detection Limits* |
Low-ng/L to sub-µg/L (compound dependent) |
|
Best-case Water MDL* |
< 10 ng/L (0.009 µg/L, MTBE) |
|
Air Detection Limits |
Single-digit pptv to low ppbv (compound dependent) |
|
Cycle Time (water) |
30-75 minutes (method dependent) |
|
Zero level drift (per analyte) |
< MDL |
|
Analytical Precision (per analyte)†† |
greater of 25% of measured value or MDL |
|
Analytical Accuracy (per analyte)†† |
greater of 30% or MDL |
|
Reference Methods |
Comparable to EPA 5030B / 8260B; TO-15 equivalent (air) |
|
Sampling Interface |
Direct sparge / continuous dynamic headspace |
|
Input streams |
Up to 20 linesRO-Feed, RO-Permeate, Calibration / Blank (multi-port) |
|
Purge Gas |
Ultrapure N2 (reagent-free headspace sampling) |
|
Measurement Modes |
Continuous online and automated periodic sampling |
|
Speciated Coverage |
Up to 27 VOCs per cycle (expanding) |
|
Cycle Time (water) |
30-75 minutes (method dependent) |
|
Co-deployment |
Operates alongside online NPOC (TOC) analyzers |
Fluid Parameters & Operating Conditions
|
Purge Gas |
Ultrapure (UHP) N2 |
|
Purge Gas Supply Pressure |
40-80 psig |
|
Water Inlet Pressure Range |
0-120 psi |
|
Gas Connections |
Swagelok® 1/8" compression |
|
Gas Connections |
Swagelok® 1/8" |
|
Analyzer Approximate Dimensions |
18" w x 20" h x 23" d |
|
Installation |
Benchtop or 19" Rack |
|
Analyzer Weight |
50 kg (110 lbs) |
|
Power Consumption |
175W ave, 120 W Standby, Peak 450W (< 10 seconds) |
|
Power Source |
105-120 VAC, 60 Hz |
|
Warm-up Time |
< 45 minutes |
|
Temperature Range |
5°C - 30°C |
|
Humidity Range |
5%-85% RH, noncondensing |
|
Power and Gas Connections |
Front Panel |
Consumables
|
Ultrapure N2 consumption |
< 2.5 standard L/h |
|
Sorbent Collector Lifetime |
> 5000 measurements |
|
Column |
> 5000 measurements |
|
Front-end Filter (for dust/smoke) |
Condition dependent |
Optimized direct sparge interface for online analysis of VOCs from water.
RO-Feed, RO-Permeate, and calibration/blank lines feed the sparge vessel; ultrapure N2 purges headspace VOCs to the AROMA-UPW for speciated, real-time analysis
